A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation

CMOS BEOL-embedded z-axis accelerometer

ELECT A first reported complementary metal-oxide semiconductor (CMOS)integrated acceleration sensor obtained through isotropic inter-metal dielectric (IMD) etching of a back-end-of-line (BEOL) integrated circuit interconnection stack, without any additional substrate etching steps, is presented. The mechanical device composed of a CMOSprocess 8 μm-thick metal-via-metal stack of 135 μm diameter ...

A Novell Hall Magnetometer Using Dynamic Offset Cancellation

Abstract: A novel Hall magnetometer using dynamic offset cancellation principle is presented. It consists from a single triangular silicon plate with three contacts and interface electronics. The proposed dynamic offset-cancelling measurement cycle includes three states. During each state, an external circuit is switched to the plate contacts in a certain way. This way, the direction of current...

Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator

CMOS Instrumentation Amplifier with Offset Cancellation Circuitry for Biomedical Application

This paper presents the design and development of a CMOS Instrumentation Amplifier for biomedical application. This design manages to achieve 101dB gain, PSRR > 102dB and 91dB CMRR. The final circuit consumes total of 0.318μWatts power at 1.8V supply voltage and possesses die size of 9.6nm area. It also has a full CMOS implementation of offset cancellation circuitry, among the first of its kind...

A Monolithic Three-Axis Accelerometer with Wafer- Level Package by CMOS MEMS Process

This paper presents a monolithic three-axis accelerometer with wafer-level package by CMOS MEMS process. The compositions of the microstructure are selected from CMOS layers in order to suppress the in-plane and out-of-plane bending deflection caused by the residual stresses in multiple layers. A switched-capacitor sensing circuit with a trimming mechanism is used to amplify the capacitive sign...